EFEM Enclosure (Genmark Automation)

OEM MiniEnvironments for Semiconductor Equipment

Genmark Automation came to us searching for a new MiniEnvironment (ME) provider to satisfy current orders. Having had previous ME experience, they knew basically what they needed, but sought an experienced supplier that could get the job done right the first time.

The schedule was already defined and did not include any development time, so iE’s ability to quickly implement a new design was key to the project’s success. We were able to design an entire skin set, internal and external, a control system that dynamically maintains precise pressurization, and meet all automation integration requirements including ME Best Practices and BOLTS interface. Not to be overlooked, our assignment included developing a chassis to accommodate robotics and harnessing, provide polished stainless steel inside and out, install internal lighting and ship assembled.

EFEM Enclosure (Newport)

Expertise in MiniEnvironment Design

Newport needed experienced Enclosure Designers to help them to develop a new EFEM product. iE was able to work with Newport's staff to design the EFEM frame and integral enclosure which could be produced by Newport using their in-house manufacturing capability. iE's participation insured Newports delivery of a quality product to market in a timely manner.