Tunnel Enclosure (Middlesex Automation)
Middlesex Automation presented iE with an interesting
challenge; the transportation of wafers from one
cleanroom to another, through 50 feet of unclassified
warehouse space. Middlesex, (the supplier
of automation equipment for the facility) provided an
overhead wafer transport line and elevator to bridge the space between the cleanrooms.
contracted to design a system to ensure a clean environment to
protect bare wafers during the passage through
the dirty zones. iE designed, manufactured and
installed a clean tunnel system that met Class 10 Federal Standard 209E requirements and also provided structural support for the
conveyor system and attached elevator. Modular
sections were developed
to facilitate easy assembly and balancing of
pressure displays were incorporated to
allow facility personnel to verify the air system's status.
The modular, tunnel environment developed here can be reconfigured and implemented
for a variety
of automation configurations and facility layouts. Recent techology developments allow inhanced cleanliness standards to ISO class 2 and control of temperature, ionization and vibration.