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Semiconductor
Semiconductor fabrication has thoroughly transitioned from an open clean
room to the incorporation of mini-environments as an important part of
its contamination control strategy. IE was a pioneer in the concept of
process equipment enclosure and is firmly committed to the advancement
of mini-environment technology.
We work closely with our customers to identify needs and requirements
specific to their process and then develop a solution custom tailored
to their performance specifications.
Our innovative airflow management technologies and intelligent sensing
systems result in the precision environmental control needed for sub-micron
fabrication processes. All designs comply with appropriate Sematech
and SEMI standards including Integrated Minienvironment Design Best
Practices, whether for 300mm or
retrofit applications, and incorporate a number of other guidelines
sanctioned by related industry associations including:
International SEMATECH
SEMI (semiconductor and equipment materials
international)
ISO (international organization for standardization)
IEST (institute of environmental sciences and technology)
IEEE (institute of electrical and electronics engineers)
OSHA (occupational safety & health administration)
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